EXCIMER-LASER ETCHING ON SILICON

被引：44

作者：

HORIIKE, Y

HAYASAKA, N

SEKINE, M

ARIKADO, T

NAKASE, M

OKANO, H

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1987年 / 44卷 / 04期

关键词：

D O I：

10.1007/BF00624598

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：313 / 322

页数：10

共 25 条

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HAYASAKA, N ;

OKANO, H ;

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HORIIKE, Y .

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[9]

HORIIKE Y, 1977, SEMICONDUCTOR SILICO, P1071

[10]

HORIIKE Y, 1984, VLSI ELECT MICROSTRU, V8, P448

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