GROWTH AND CHARACTERIZATION OF LARGE DIAMETER UNDOPED SEMI-INSULATING GAAS FOR DIRECT ION-IMPLANTED FET TECHNOLOGY

被引:40
作者
THOMAS, RN
HOBGOOD, HM
ELDRIDGE, GW
BARRETT, DL
BRAGGINS, TT
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D O I
10.1016/0038-1101(81)90034-4
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:387 / &
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