TUNGSTEN EVAPORATION LIMIT OF HOT-CATHODE IONIZATION GAUGES

被引:18
作者
ANGERTH, B
HULEK, Z
机构
[1] EUROPEAN ORG NUCL RES, 1211 GENEVA 23, SWITZERLAND
[2] CZECH TECH UNIV, FAC TECH & NUCL PHYS, BREHOVA 7, PRAGUE 1, CZECHOSLOVAKIA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 01期
关键词
D O I
10.1116/1.1318655
中图分类号
O59 [应用物理学];
学科分类号
摘要
Experiments were made to determine reasons for discrepancies in measurements of pressure in the low 10** minus **1**2 Torr range with hot filament and partial pressure gages. The method proposed by Alpert and Buritz, with a slight modification, was used for estimates of the tungsten evaporation limit, which for three gages fell in the range (1-2) multiplied by 10** minus **1**2 Torr at electron emission of 10 mA. Reduced emission of the ionization gage at 4 mA is recommended to reduce error due to tungsten vapor.
引用
收藏
页码:461 / 465
页数:5
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