DEVELOPMENT OF A HYPERTHERMAL OXYGEN-ATOM GENERATOR

被引：7

作者：

HOFLUND, GB ^{[1
]}

DAVIDSON, MR ^{[1
]}

OUTLAW, RA ^{[1
]}

机构：

[1] NASA,LANGLEY RES CTR,HAMPTON,VA 23665

来源：

SURFACE AND INTERFACE ANALYSIS | 1992年 / 19卷 / 1-12期

关键词：

D O I：

10.1002/sia.740190161

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A source that is compact, durable and mounts on a standard ultrahigh vacuum (UHV) flange has been developed for the generation of hyperthermal oxygen atoms. In this source oxygen atoms permeate through an Ag membrane held at 500-degrees-C and are then emitted toward the target from the vacuum side of the membrane by electron-stimulated desorption. The current prototype model generates useable 0-atom fluxes of approximately 10(12) atoms cm-2 s-1, and future modifications should increase this flux by 1-3 orders of magnitude. Based on the O+ energy distribution, the average 0 neutral energy is approximately 5 eV with a fairly broad distribution (full width at half-maximum approximately 3.6 eV). The information required for the development of this source and the design of the source are presented.

引用

页码：325 / 330

页数：6

共 15 条

[1] TPD AND ESD STUDIES OF THE INTERACTION OF HYDROGEN AND OXYGEN ON POLYCRYSTALLINE ZIRCONIUM [J].