EXTREMELY SMOOTH YBA2CU3OY THIN-FILMS GROWN USING THE REACTIVE COEVAPORATION TECHNIQUE IN RADICAL OXYGEN AT AN ULTRALOW GROWTH-RATE

被引：31

作者：

TAZOH, Y

MIYAZAWA, S

机构：

[1] NTT LSI Laboratories, Atsugi-shi, Kanagawa 243-01, 3-1, Morinosato Wakamiya

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 04期

关键词：

D O I：

10.1063/1.108917

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effect of using drastically reduced growth rates on the surface morphology of YBa2Cu3Oy (YBCO) thin films grown on lattice-matched (110) NdGaO3 substrates using the reactive coevaporation technique in a radical oxygen atmosphere is reported. The surface of films grown at an ultralow growth rate (approximately 0.0065 nm/s) appears to be very smooth without any precipitates, holes, crevasses, or pits. The film surface roughness is on the order of the unit-cell constant of superconducting YBCO, about 1.2 nm. This shows that decreasing the growth rate enhances the lateral spreading of nucleated islands, with a height of one unit cell, in the Stranski-Krastanov growth mode [Ber. Akad. Wiss, Wien 146, 797 (1938)].

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页码：408 / 410

页数：3

相关论文

共 11 条

[1] SCREW DISLOCATIONS IN HIGH-TC FILMS [J].

GERBER, C ;

ANSELMETTI, D ;

BEDNORZ, JG ;

MANNHART, J ;

SCHLOM, DG .

NATURE, 1991, 350 (6316) :279-280

[2] GROWTH-MECHANISM OF SPUTTERED FILMS OF YBA2CU3O7 STUDIED BY SCANNING TUNNELING MICROSCOPY [J].

HAWLEY, M ;

RAISTRICK, ID ;

BEERY, JG ;

HOULTON, RJ .

SCIENCE, 1991, 251 (5001) :1587-1589

[3] ALL HIGH-TC EPITAXIAL YBA2CU3OX/NDGAO3/YBA2CU3OX HETEROSTRUCTURES [J].

KOBAYASHI, J ;

TAZOH, Y ;

MUKAIDA, M ;

MIYAZAWA, S .

PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS, 1991, 185 :2039-2040

[4] ATOMIC RESOLUTION AND NANOSTRUCTURE OF YBA2CU3O7-DELTA LASER-ABLATED THIN-FILMS STUDIES BY SCANNING TUNNELING MICROSCOPY (STM) [J].

LANG, HP ;

FREY, T ;

GUNTHERODT, HJ .

EUROPHYSICS LETTERS, 1991, 15 (06) :667-670

[5] EPITAXIALLY GROWN SPUTTERED LAALO3 FILMS [J].

LEE, AE ;

PLATT, CE ;

BURCH, JF ;

SIMON, RW ;

GORAL, JP ;

ALJASSIM, MM .

APPLIED PHYSICS LETTERS, 1990, 57 (19) :2019-2021

[6] CORRELATION OF SURFACE-TOPOGRAPHY AND FLUX PINNING IN SUPERCONDUCTING YBACUO FILMS [J].

MCELFRESH, M ;

MILLER, TG ;

SCHAEFER, DM ;

REIFENBERGER, R ;

MUENCHAUSEN, RE ;

HAWLEY, M ;

FOLTYN, SR ;

WU, XD .

JOURNAL OF APPLIED PHYSICS, 1992, 71 (10) :5099-5102

[7]

MIYAZAWA S, 1992, 1991 P INT C ADV MAT, P741

[8] THERMAL-EXPANSION COEFFICIENTS OF HIGH-TC SUPERCONDUCTOR SUBSTRATE NDGAO3 SINGLE-CRYSTAL [J].

SASAURA, M ;

MIYAZAWA, S ;

MUKAIDA, M .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (07) :3643-3644

[9]

STRANSKI JN, 1983, BER AKAD WISS WIEN, V146, P77

[10] EPITAXIAL-GROWTH OF MGO LAYER ON Y1BA2CU3O7-Y THIN-FILM [J].

TANAKA, S ;

NAKANISHI, H ;

HIGAKI, K ;

ITOZAKI, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (06) :1059-1065