A MODEL FOR THE LASER-STIMULATED OXIDATION OF SILICON

被引：4

作者：

QUENON, P

WAUTELET, M

DUMONT, M

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 08期

关键词：

D O I：

10.1063/1.337813

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3112 / 3114

页数：3

共 14 条

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