THERMAL-OXIDATION OF SILICON - CHEMISORPTION AND LINEAR RATE-CONSTANT

被引：36

作者：

HU, SM

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 11期

关键词：

D O I：

10.1063/1.333000

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4095 / 4105

页数：11

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