REVISED MODEL FOR OXIDATION OF SI BY OXYGEN

被引：101

作者：

BLANC, J

机构：

来源：

APPLIED PHYSICS LETTERS | 1978年 / 33卷 / 05期

关键词：

D O I：

10.1063/1.90409

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：424 / 426

页数：3

共 11 条

[1]

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JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (09) :1380-1384

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