PREPARATION OF WHISKERS AND SPRING-LIKE FIBERS OF SI3N4 BY IMPURITY-ACTIVATED CHEMICAL VAPOR-DEPOSITION

被引：37

作者：

MOTOJIMA, S

UENO, S

HATTORI, T

IWANAGA, H

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1989年 / 96卷 / 02期

关键词：

D O I：

10.1016/0022-0248(89)90537-X

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：383 / 389

页数：7

共 13 条

[1]

GRIBKOV VN, 1972, SOV PHYS CRYSTALLOGR, V16, P852

[2]

HANNA SB, 1985, BRIT CERAM TRANS J, V84, P18

[3]

HAYASHI T, 1987, YYOGYO KYOKAI SHI, V95, P140

[4]

KANEKO Y, 1988, ZAIRYO, V37, P65

[5] PREPARATION OF SILICON-NITRIDE SINGLE-CRYSTALS BY CHEMICAL VAPOR-DEPOSITION [J].

KIJIMA, K ;

SETAKA, N ;

TANAKA, H .

JOURNAL OF CRYSTAL GROWTH, 1974, 24 (OCT) :183-187

[6] CHARACTERIZATION OF ORGANOSILICON-INFILTRATED POROUS REACTION-SINTERED SI3N4 [J].

MAZDIYASNI, KS ;

WEST, R ;

DAVID, LD .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1978, 61 (11-1) :504-508

[7] KINETICS OF NITRIDATION OF SI POWDER COMPACTS [J].

MESSIER, DR ;

WONG, P .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1973, 56 (09) :480-485

[8] CHEMICAL VAPOR GROWTH OF BETA-SIC WHISKERS FROM A GAS-MIXTURE OF SI2CL6-CH4-H2-AR [J].

MOTOJIMA, S ;

HASEGAWA, M ;

HATTORI, T .

JOURNAL OF CRYSTAL GROWTH, 1988, 87 (2-3) :311-317

[9] DEPOSITION AND MICROHARDNESS OF SIC FROM THE SI2CL6-C3H8-H2-AR SYSTEM [J].

MOTOJIMA, S ;

IWAMORI, N ;

HATTORI, T ;

KUROSAWA, K .

JOURNAL OF MATERIALS SCIENCE, 1986, 21 (04) :1363-1367

[10]

MOTOJIMA S, 1986, J MATER SCI, V21, P3836, DOI 10.1007/BF02431619

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