TEXTURE OF VAPOR-DEPOSITED PARYLENE THIN-FILMS

The texture of vapor deposited parylene (poly-p-xylylene) thin films on Si is measured using the x-ray pole figure technique to quantify the crystalline portion. The as-deposited sample is the monoclinic alpha phase where the (020) fiber texture component comprises 48% and the remaining 52% are randomly oriented crystallites. The sample annealed for 350-degrees-C 12 h is hexagonal beta phase with an (040) fiber texture component of 68%. The half-width (omega) of the (040) fiber component of the beta crystallites is within 25-degrees of the substrate normal (fiber axis). In a beta(040) oriented crystallite, the polymer chain is parallel to the Si substrate. This beta fiber texture develops by polymer chain movement and rearrangement of the as-deposited alpha fiber texture.