TEXTURE ANALYSIS OF AL/SIO2 FILMS DEPOSITED BY A PARTIALLY IONIZED BEAM

被引：24

作者：

KNORR, DB ^{[1
]}

LU, TM ^{[1
]}

机构：

[1] RENSSELAER POLYTECH INST,CTR INTEGRATED ELECTR,DEPT PHYS,TROY,NY 12180

来源：

APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 22期

关键词：

D O I：

10.1063/1.101126

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2210 / 2212

页数：3

共 16 条

[1]

BUNGE HJ, 1982, QUANTITATIVE TEXTURE, P85

[2] ANALYSIS OF CERTAIN ERRORS IN THE X-RAY REFLECTION METHOD FOR THE QUANTITATIVE DETERMINATION OF PREFERRED ORIENTATIONS [J].

CHERNOCK, WP ;

BECK, PA .

JOURNAL OF APPLIED PHYSICS, 1952, 23 (03) :341-345

[3] EPITAXIAL-GROWTH OF AL(111) SI(111) FILMS USING PARTIALLY IONIZED BEAM DEPOSITION [J].

CHOI, CH ;

HARPER, RA ;

YAPSIR, AS ;

LU, TM .

APPLIED PHYSICS LETTERS, 1987, 51 (24) :1992-1994

[4]

Cullity B.D., 1978, ELEMENTS XRAY DIFFRA

[5]

Fraser D. B., 1983, VLSI technology, P347

[6]

GHATE PB, 1983, SOLID STATE TECH MAR, P113

[7]

Li P. T. X, UNPUB

[8] A HIGH IONIZATION EFFICIENCY SOURCE FOR PARTIALLY IONIZED BEAM DEPOSITION [J].

MEI, SN ;

LU, TM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (01) :9-12

[9]

PRAMANIK D, 1983, SOLID STATE TECHNO 2, P131

[10] A DIRECT METHOD OF DETERMINING PREFERRED ORIENTATION OF A FLAT REFLECTION SAMPLE USING A GEIGER COUNTER X-RAY SPECTROMETER [J].

SCHULZ, LG .

JOURNAL OF APPLIED PHYSICS, 1949, 20 (11) :1030-1032

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