INTERFACE CHEMICAL-REACTION AND DIFFUSION OF THIN METAL-FILMS ON SEMICONDUCTORS

被引：32

作者：

BRILLSON, LJ

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(82)90326-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：461 / 469

页数：9

共 41 条

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