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LOCAL LATTICE DISTORTION RELATING TO PHOSPHORUS ANTISITE DEFECT IN PHOSPHORUS-ION-IMPLANTED GAP LAYER
被引:16
作者
:
KURIYAMA, K
论文数:
0
引用数:
0
h-index:
0
机构:
HOSEI UNIV,ION BEAM TECHNOL RES CTR,KOGANEI,TOKYO 184,JAPAN
HOSEI UNIV,ION BEAM TECHNOL RES CTR,KOGANEI,TOKYO 184,JAPAN
KURIYAMA, K
[
1
]
KATO, T
论文数:
0
引用数:
0
h-index:
0
机构:
HOSEI UNIV,ION BEAM TECHNOL RES CTR,KOGANEI,TOKYO 184,JAPAN
HOSEI UNIV,ION BEAM TECHNOL RES CTR,KOGANEI,TOKYO 184,JAPAN
KATO, T
[
1
]
TAJIMA, S
论文数:
0
引用数:
0
h-index:
0
机构:
HOSEI UNIV,ION BEAM TECHNOL RES CTR,KOGANEI,TOKYO 184,JAPAN
HOSEI UNIV,ION BEAM TECHNOL RES CTR,KOGANEI,TOKYO 184,JAPAN
TAJIMA, S
[
1
]
KATO, T
论文数:
0
引用数:
0
h-index:
0
机构:
HOSEI UNIV,ION BEAM TECHNOL RES CTR,KOGANEI,TOKYO 184,JAPAN
HOSEI UNIV,ION BEAM TECHNOL RES CTR,KOGANEI,TOKYO 184,JAPAN
KATO, T
[
1
]
TAKEDA, S
论文数:
0
引用数:
0
h-index:
0
机构:
HOSEI UNIV,ION BEAM TECHNOL RES CTR,KOGANEI,TOKYO 184,JAPAN
HOSEI UNIV,ION BEAM TECHNOL RES CTR,KOGANEI,TOKYO 184,JAPAN
TAKEDA, S
[
1
]
机构
:
[1]
HOSEI UNIV,ION BEAM TECHNOL RES CTR,KOGANEI,TOKYO 184,JAPAN
来源
:
APPLIED PHYSICS LETTERS
|
1995年
/ 66卷
/ 22期
关键词
:
D O I
:
10.1063/1.114255
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
The local lattice distortion relating to the phosphorus antisite defect (PGa) in the P+-ion-implanted GaP layer was studied using Rutherford backscattering (RBS), photoacoustic (PA), Raman scattering, and photoluminescence (PL) methods. The displacement fraction due to the excess phosphorus in 800°C annealed samples is estimated to be ∼2×1020/cm3 by RBS channeling measurements. The slight reduction of the LO-TO phonon frequency splitting of the annealed P+-ion-implanted GaP with respect to the unimplanted one indicates the presence of PGa, corresponding to x=0.0084 of Ga1-xP1+x. This is consistent with the displacement fraction estimated by RBS. A PL emission relating to PGa is observed at 716 mm (1.73 eV).© 1995 American Institute of Physics.
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页码:2995 / 2997
页数:3
相关论文
共 13 条
[11]
LIZETS M, 1966, FIZ TVERD TELA+, V8, P463
[12]
Pankove J. I., 1975, OPTICAL PROCESSES SE
[13]
Phillips J. C., 1973, BONDS BANDS SEMICOND
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共 13 条
[11]
LIZETS M, 1966, FIZ TVERD TELA+, V8, P463
[12]
Pankove J. I., 1975, OPTICAL PROCESSES SE
[13]
Phillips J. C., 1973, BONDS BANDS SEMICOND
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1
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