SYNTHESIS OF ALPHA-FORM OF SILICON-NITRIDE FROM SILICA

被引:84
作者
KOMEYA, K [1 ]
INOUE, H [1 ]
机构
[1] TOKYO SHIBAURA ELECT CO LTD,TOSHIBA RES & DEV CTR,KAWASAKI,JAPAN
关键词
D O I
10.1007/BF00541410
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:1243 / 1246
页数:4
相关论文
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