DC REACTIVELY SPUTTERED IRON-OXIDE FILMS FOR SELECTIVELY SEMITRANSPARENT PHOTOMASKS .2. RELATION BETWEEN THE STRUCTURE OF THE FILMS AND THEIR MECHANICAL AND CHEMICAL-PROPERTIES

被引:2
作者
ORLINOV, V
GORANCHEV, B
SAROV, G
MISIUK, A
机构
[1] INST SEMICONDUCTOR TECH,BOTEVGRAD,BULGARIA
[2] POLYTECH INST WROCLAW,INST ELECTR TECHNOL,PL-50370 WROCLAW,POLAND
关键词
D O I
10.1016/0040-6090(80)90297-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:135 / 143
页数:9
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