DC REACTIVELY SPUTTERED IRON-OXIDE FILMS FOR SELECTIVELY SEMITRANSPARENT PHOTOMASKS .2. RELATION BETWEEN THE STRUCTURE OF THE FILMS AND THEIR MECHANICAL AND CHEMICAL-PROPERTIES

被引：2

作者：

ORLINOV, V

GORANCHEV, B

SAROV, G

MISIUK, A

机构：

[1] INST SEMICONDUCTOR TECH,BOTEVGRAD,BULGARIA

[2] POLYTECH INST WROCLAW,INST ELECTR TECHNOL,PL-50370 WROCLAW,POLAND

来源：

关键词：

D O I：

10.1016/0040-6090(80)90297-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：135 / 143

页数：9