DEVELOPMENT OF HIGHLY RELIABLE SYNCHROTRON RADIATION LITHOGRAPHY BEAMLINE

被引：9

作者：

OKADA, K ^{[1
]}

FUJII, K ^{[1
]}

KAWASE, Y ^{[1
]}

NAGANO, M ^{[1
]}

机构：

[1] NEC CORP,DIV RES & DEV PLANNING & TECH SERV,MIYAMAE KU,KAWASAKI,KANAGAWA 213,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 01期

关键词：

D O I：

10.1116/1.584043

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：191 / 194

页数：4

共 10 条

[1] MEASUREMENTS ON THE EFFICIENCY OF ACOUSTIC DELAY-LINES IN VIEW OF BEAM LINES FOR SYNCHROTRON RADIATION
BETZ, H
HOFBAUER, P
HEUBERGER, A
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (03): : 924 - 926
[2] SYNCHROTRON RADIATION X-RAY-LITHOGRAPHY
HAELBICH, RP
SILVERMAN, JP
WARLAUMONT, JM
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1984, 222 (1-2) : 291 - 301
[3] Heuberger A., 1986, Microelectronic Engineering, V5, P3, DOI 10.1016/0167-9317(86)90026-2
[4] Jean R., 1964, VIDE, V111, P123
[5] PNEUMATICALLY-DRIVEN FAST CLOSING VALVE SYSTEM FOR SYNCHROTRON RADIATION SOURCES
KANAYA, N
SATO, S
NAKAJIMA, K
HAYASHI, S
[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1986, 33 (03) : 1071 - 1077
[6] THE MIRROR MATERIAL TEST PROGRAM AT THE DARESBURY SRS
MACDOWELL, AA
WEST, JB
KOIDE, T
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1986, 246 (1-3) : 219 - 222
[7] SIC MIRRORS FOR SYNCHROTRON RADIATION
REHN, V
CHOYKE, WJ
[J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 177 (01): : 173 - 178
[8] TRANSIT TIMES OF PRESSURE WAVES IN AN ACOUSTIC DELAY-LINE
SATO, S
KAKIZAKI, A
MIYA, T
MORIOKA, Y
YAMAKAWA, T
ISHII, T
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1985, 240 (01) : 194 - 198
[9] FRONT ENDS FOR THE PHOTON FACTORY BEAM LINES
SATO, S
KOIDE, T
MORIOKA, Y
ISHII, T
SUGAWARA, H
NAGAKURA, I
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 208 (1-3): : 31 - 36
[10] REFLECTANCE SPECTRA OF EXTREME ULTRAVIOLET MIRRORS FOR SYNCHROTRON RADIATION
SUGAWARA, H
SATO, S
MIYAHARA, T
KAKIZAKI, A
MORIOKA, Y
IGUCHI, Y
NAGAKURA, I
ANDO, M
OHTA, T
AOKI, S
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1985, 228 (2-3) : 549 - 555

← 1 →