SYNCHROTRON RADIATION X-RAY-LITHOGRAPHY

被引：26

作者：

HAELBICH, RP ^{[1
]}

SILVERMAN, JP ^{[1
]}

WARLAUMONT, JM ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

关键词：

D O I：

10.1016/0167-5087(84)90547-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：291 / 301

页数：11

共 24 条

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