SYNCHROTRON RADIATION X-RAY-LITHOGRAPHY

被引:26
作者
HAELBICH, RP [1 ]
SILVERMAN, JP [1 ]
WARLAUMONT, JM [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1016/0167-5087(84)90547-7
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:291 / 301
页数:11
相关论文
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