PMMA CO-POLYMERS AS HIGH-SENSITIVITY ELECTRON RESISTS

被引:77
作者
HATZAKIS, M
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期
关键词
D O I
10.1116/1.570372
中图分类号
O59 [应用物理学];
学科分类号
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页码:1984 / 1988
页数:5
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