ONE-STEP PHASE-SHIFT 3-D SURFACE PROFILOMETRY WITH GRATING PROJECTION

被引:9
作者
GU, RW
YOSHIZAWA, T
OTANI, Y
机构
[1] Department of Mechanical Systems Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo, 184
关键词
D O I
10.1016/0143-8166(94)90060-4
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A 3-D profiling system has been developed using a grating projection approach and a one-step phase shift algorithm. In the system, a grating pattern projected on an object surface is acquired by a CCD camera, and the grating's phase deformation caused by the surface shape is extracted by spatial phase shift processing, which uses only one frame of digital image. One phase value can be calculated from a successive 3-pixel range if the fringe period is set to either 4-pixel width or 8-pixel width. The fixed phase distribution of the system is excluded by a standard plane calibration. With 8-bit input data, the system's RMS phase accuracy is developed up to 2pi/60 in the experimental examinations.
引用
收藏
页码:61 / 75
页数:15
相关论文
共 11 条
[1]  
GU RW, 1990, P SOC PHOTO-OPT INS, V1230, P638
[2]  
GU RW, 1992, P SOC PHOTO-OPT INS, V1720, P470, DOI 10.1117/12.132157
[3]  
KOMATSUBARA R, 1989, J SOC PRECISION ENG, V55, P85
[4]  
Kwon O. Y., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V816, P196, DOI 10.1117/12.941766
[5]   ABSOLUTE AND COMPARATIVE MEASUREMENTS OF 3-DIMENSIONAL SHAPE BY PHASE MEASURING MOIRE TOPOGRAPHY [J].
REID, GT ;
RIXON, RC ;
MESSER, HI .
OPTICS AND LASER TECHNOLOGY, 1984, 16 (06) :315-319
[6]  
SHOUGH DM, 1990, P SOC PHOTO-OPT INS, V1221, P394, DOI 10.1117/12.18359
[7]   AUTOMATED PHASE-MEASURING PROFILOMETRY - A PHASE MAPPING APPROACH [J].
SRINIVASAN, V ;
LIU, HC ;
HALIOUA, M .
APPLIED OPTICS, 1985, 24 (02) :185-188
[8]   PHASE-STEPPING GRATING PROFILOMETRY - UTILIZATION OF INTENSITY MODULATION ANALYSIS IN COMPLEX OBJECTS EVALUATION [J].
SU, XY ;
VONBALLY, G ;
VUKICEVIC, D .
OPTICS COMMUNICATIONS, 1993, 98 (1-3) :141-150
[9]   FOURIER-TRANSFORM PROFILOMETRY FOR THE AUTOMATIC-MEASUREMENT OF 3-D OBJECT SHAPES [J].
TAKEDA, M ;
MUTOH, K .
APPLIED OPTICS, 1983, 22 (24) :3977-3982
[10]   AUTOMATIC PROFILOMETRY OF 3-D DIFFUSE OBJECTS BY SPATIAL PHASE DETECTION [J].
TOYOOKA, S ;
IWAASA, Y .
APPLIED OPTICS, 1986, 25 (10) :1630-1633