EXTREME SELECTIVITY IN THE LIFT-OFF OF EPITAXIAL GAAS FILMS

被引：651

作者：

YABLONOVITCH, E

GMITTER, T

HARBISON, JP

BHAT, R

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 26期

关键词：

D O I：

10.1063/1.98946

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2222 / 2224

页数：3

共 9 条

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