SURFACE PRECIPITATION OF BORON-NITRIDE ON THE SURFACE OF STAINLESS-STEEL BORON-NITRIDE FILM

被引：14

作者：

TOSA, M

YOSHIHARA, K

机构：

[1] National Research Institute for Metals, Tsukuba, 1-2-1, Sengen

来源：

VACUUM | 1990年 / 41卷 / 7-9期

关键词：

D O I：

10.1016/0042-207X(90)94118-A

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A mixture of type 304 stainless steel and boron nitride was deposited on the surface of type 304 substrate with a r.f. magnetron sputtering method. Scanning Auger electron microscopy and X-ray photoelectron spectroscopy observation showed that boron nitride precipitated on the surface of the deposited film and the precipitated boron nitride uniformly covered the surface after annealing at more than 600 K in high vacuum. Only small carbon and oxygen Auger peaks were observed on the surface of the precipitated boron nitride after the 3.6 ks (= 1 hour) exposure in air indicating that the surface of this film covered with boron nitride was inert to gas adsorption. Therefore, the film of the mixture of stainless steel and boron nitride can be candidate material for surface modification of vacuum vessels.

引用

页码：1873 / 1875

页数：3

共 9 条

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DAVIS LE, 1978, HDB AUGER ELECTRON S

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