HIGHLY UNIFORM, HIGH-PURITY GAAS EPITAXIAL LAYER GROWN BY MBE USING TRIETHYLGALLIUM AND ARSENIC

被引:7
作者
SAITO, J [1 ]
ONO, K [1 ]
NANBU, K [1 ]
ISHIKAWA, T [1 ]
KONDO, K [1 ]
机构
[1] FUJITSU LABS LTD, ATSUGI 24301, JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 06期
关键词
D O I
10.1143/JJAP.27.L1144
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L1144 / L1147
页数:4
相关论文
共 12 条
  • [11] SAITO J, 1986, SEMIINSULATING 3 5 M, P525
  • [12] DEFECTS IN GAAS FILMS GROWN BY MOMBE
    WERNER, K
    HEINECKE, H
    WEYERS, M
    LUTH, H
    BALK, P
    [J]. JOURNAL OF CRYSTAL GROWTH, 1987, 81 (1-4) : 281 - 287