DESIGN-FEATURES OF AN ULTRAHIGH-VACUUM ELECTRON-MICROSCOPE FOR REM-PEEM STUDIES OF SURFACES

被引：19

作者：

KONDO, Y ^{[1
]}

YAGI, K ^{[1
]}

KOBAYASHI, K ^{[1
]}

KOBAYASHI, H ^{[1
]}

YANAKA, Y ^{[1
]}

KISE, K ^{[1
]}

OHKAWA, T ^{[1
]}

机构：

[1] TOKYO INST TECHNOL,DEPT PHYS,TOKYO 152,JAPAN

来源：

ULTRAMICROSCOPY | 1991年 / 36卷 / 1-3期

关键词：

D O I：

10.1016/0304-3991(91)90145-V

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A new ultrahigh-vacuum (UHV) transmission electron microscope (TEM) for TEM and REM (reflection electron microscope) studies of surfaces, which can also be used as a photoemission electron microscope (PEEM), has been designed. TEM-REM observations give surface crystallographic information, while PEEM observations give information on spatial changes of surface electronic structures. An O-ringless bakable side-entry goniometer was newly designed, to which specimens can be transferred from a UHV specimen preparation chamber. The goniometer can tilt the specimen more than 90-degrees from REM to PEEM observation positions. It also has the second tilt in addition to X-, Y- and Z-shift. A special objective lens was designed, which allowed 45-degrees illumination with ultra-violet light on the specimen. For image recording, a TV camera connected to a microchannel plate was adopted.

引用

页码：142 / 147

页数：6

共 16 条

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