MATERIALS AND PROCESSES FOR PREFORM FABRICATION - MODIFIED CHEMICAL VAPOR-DEPOSITION AND PLASMA CHEMICAL VAPOR-DEPOSITION

被引:22
作者
MACCHESNEY, JB
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D O I
10.1109/PROC.1980.11826
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:1181 / 1184
页数:4
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