SPHERICAL-ABERRATION CORRECTION OF AN ELECTRON LENS BY HOLOGRAPHY

被引:47
作者
TONOMURA, A
MATSUDA, T
ENDO, J
机构
[1] Central Research Laboratory, Hitachi Ltd., Tokyo
关键词
D O I
10.1143/JJAP.18.1373
中图分类号
O59 [应用物理学];
学科分类号
摘要
Electron image holograms of a crystalline fine particle are made with a field emission electron microscope. The spherical aberration of the electron lens is corrected in the optical reconstruction stage, using an optical lens as a compensator. Lattice images separated from the particle in the exactly focused electron microscopic image are formed inside the particle in the spherically corrected image and give correct information on the crystal lattice of the gold particle. © 1979 IOP Publishing Ltd.
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页码:1373 / 1377
页数:5
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