PLANARIZATION OF SUBSTRATE TOPOGRAPHY BY SPIN COATING

被引：77

作者：

STILLWAGON, LE

LARSON, RG

TAYLOR, GN

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 8A期

关键词：

D O I：

10.1149/1.2100813

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2030 / 2037

页数：8

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