DEPOSITION OF ALUMINUM FROM AN ELECTRON-BEAM SOURCE

被引:7
作者
GRAPER, EB
机构
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1972年 / 9卷 / 01期
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D O I
10.1116/1.1316601
中图分类号
O59 [应用物理学];
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页码:33 / &
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