DEGRADATION OF TIN-DOPED INDIUM-OXIDE FILM IN HYDROGEN AND ARGON PLASMA

被引：87

作者：

BANERJEE, R

RAY, S

BASU, N

BATABYAL, AK

BARUA, AK

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 03期

关键词：

D O I：

10.1063/1.339699

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：912 / 916

页数：5

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共 7 条

[1] CHARACTERIZATION OF TIN DOPED INDIUM OXIDE-FILMS PREPARED BY ELECTRON-BEAM EVAPORATION
BANERJEE, R
DAS, D
RAY, S
BATABYAL, AK
BARUA, AK
[J]. SOLAR ENERGY MATERIALS, 1986, 13 (01): : 11 - 23
[2] RECENT DEVELOPMENTS IN AMORPHOUS-SILICON SOLAR-CELLS
CARLSON, DE
[J]. SOLAR ENERGY MATERIALS, 1980, 3 (04): : 503 - 518
[3] TRANSPARENT HEAT-REFLECTING COATINGS BASED ON HIGHLY DOPED SEMICONDUCTORS
FRANK, G
KAUER, E
KOSTLIN, H
[J]. THIN SOLID FILMS, 1981, 77 (1-3) : 107 - 117
[4] DEGRADATION OF ITO FILM IN GLOW-DISCHARGE PLASMA
KUBOI, O
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (11) : L783 - L786
[5] GLOW-DISCHARGE PRODUCED AMORPHOUS SILICON SOLAR-CELLS
OKAMOTO, H
NITTA, Y
ADACHI, T
HAMAKAWA, Y
[J]. SURFACE SCIENCE, 1979, 86 (JUL) : 486 - 491
[6] ELECTRICAL AND OPTICAL-PROPERTIES OF UNDOPED AND ANTIMONY-DOPED TIN OXIDE-FILMS
SHANTHI, E
DUTTA, V
BANERJEE, A
CHOPRA, KL
[J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (12) : 6243 - 6251
[7] TSUGE K, 1984, 1ST INT PHOT SCI ENG, P179