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MODELS FOR INTERPRETING DEPOSITION RATE DATA FROM A CLOSED CHEMICAL VAPOR-DEPOSITION SYSTEM

被引：8
作者：
CARLSSON, JO
机构：
来源：
JOURNAL OF THE LESS-COMMON METALS | 1980年 / 71卷 / 01期
关键词：
D O I：
10.1016/0022-5088(80)90097-1
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：15 / 32
页数：18
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