DEPOSITION RATE AND RATE-LIMITING STEPS IN THE CHEMICAL VAPOR-DEPOSITION OF BORON IN A CLOSED SYSTEM

被引：7

作者：

CARLSSON, JO

机构：

来源：

JOURNAL OF THE LESS-COMMON METALS | 1980年 / 71卷 / 01期

关键词：

D O I：

10.1016/0022-5088(80)90096-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：1 / 14

页数：14

共 12 条

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CARLSSON, JO .

JOURNAL OF THE LESS-COMMON METALS, 1980, 70 (01) :77-96

[4]

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[5]

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[6]

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[7]

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[8]

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[9]

JONES ME, 1975, TREATISE SOLID STATE, V5, P295

[10]

MEHALSO RM, 1975, 5TH P INT C CHEM VAP, P84