FACTORS INFLUENCING THE MORPHOLOGIES OF BORON DEPOSITED BY CHEMICAL VAPOR-DEPOSITION

被引:9
作者
CARLSSON, JO
机构
来源
JOURNAL OF THE LESS-COMMON METALS | 1980年 / 70卷 / 01期
关键词
D O I
10.1016/0022-5088(80)90275-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:77 / 96
页数:20
相关论文
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