LEAST-SQUARES ANALYSIS OF FILM-SUBSTRATE PROBLEM IN ELLIPSOMETRY

被引：27

作者：

LOESCHER, DH

DETRY, RJ

CLAUSER, MJ

机构：

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1971年 / 61卷 / 09期

关键词：

D O I：

10.1364/JOSA.61.001230

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1230 / &

共 20 条

[1] DETERMINATION OPTICAL PROPERTIES OF ABSORBING UNIAXIAL CRYSTALS FROM REFLECTANCE AT OBLIQUE INCIDENCE [J].

BERMAN, M .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1970, 60 (05) :646-&

[2]

DEUTSCH R, 1965, ESTIMATION THEORY, P52

[3]

DEUTSCH R, 1965, ESTIMATION THEORY, P62

[4]

Deutsch R, 1965, ESTIMATION THEORY

[5]

DEUTSCH R, 1965, ESTIMATION THEORY, pCH4

[6]

DRUDE P, 1899, ANN PHYSIK, V30, P865

[7]

DRUDE P, 1899, ANN PHYSIK, V30, P532

[8] OPTICAL CONSTANTS OF ALUMINUM FILMS RELATED TO VACUUM ENVIRONMENT [J].

FANE, RW ;

NEAL, WEJ .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1970, 60 (06) :790-&

[9] ANISOTROPY OF OPTICAL CONSTANTS AND BAND STRUCTURE OF GRAPHITE [J].

GREENAWAY, DL ;

HARBEKE, G ;

BASSANI, F ;

TOSATTI, E .

PHYSICAL REVIEW, 1969, 178 (03) :1340-+

[10] OPTICAL CONSTANTS OF GERMANIUM BY ELLIPSOMETRY [J].

KNAUSENBERGER, WH ;

VEDAM, K .

PHYSICS LETTERS A, 1969, A 29 (08) :428-+

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