OPTICAL CONSTANTS OF GERMANIUM BY ELLIPSOMETRY

被引:3
作者
KNAUSENBERGER, WH
VEDAM, K
机构
[1] Materials Research Laboratory, The Pennsylvania State University, University Park
关键词
D O I
10.1016/0375-9601(69)90500-3
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
From a series of ellipsometric measurements on cleaved germanium surfaces, a solution is found for all of the optical parameters of both the substrate and the surface film as n2=5.46 ± 0.10, k2=1.75 ± 0.14 and n1=1.639 ± 0.012 at λ=5461 A ̊. © 1969.
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页码:428 / +
页数:1
相关论文
共 11 条
[1]   OPTICAL CONSTANTS OF GERMANIUM - 3600-A TO 7000-A [J].
ARCHER, RJ .
PHYSICAL REVIEW, 1958, 110 (02) :354-358
[2]   EFFECT OF SURFACE DAMAGE ON REFLECTANCE OF GERMANIUM IN 2650-10 000-A REGION [J].
DONOVAN, TM ;
BENNETT, HE ;
ASHLEY, EJ .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1963, 53 (12) :1403-&
[3]   SURFACE MEASUREMENTS ON FRESHLY CLEAVED SILICON PARA-NORMAL JUNCTIONS [J].
GOBELI, GW ;
ALLEN, FG .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1960, 14 :23-&
[4]   DIRECT AND INDIRECT EXCITATION PROCESSES IN PHOTOELECTRIC EMISSION FROM SILICON [J].
GOBELI, GW ;
ALLEN, FG .
PHYSICAL REVIEW, 1962, 127 (01) :141-&
[5]  
LUKES F, 1968 P INT C ELL LIN
[6]   OPTICAL CONSTANTS OF GERMANIUM IN THE REGION-1 TO 10 EV [J].
PHILIPP, HR ;
TAFT, EA .
PHYSICAL REVIEW, 1959, 113 (04) :1002-1005
[7]   OPTICAL PROPERTIES OF SEMICONDUCTORS [J].
PHILIPP, HR ;
EHRENREICH, H .
PHYSICAL REVIEW, 1963, 129 (04) :1550-&
[8]   OPTICAL CONSTANTS OF GERMANIUM IN SPECTRAL REGION FROM 0.5 EV TO 3.0 EV [J].
POTTER, RF .
PHYSICAL REVIEW, 1966, 150 (02) :562-&
[9]   THIN OXIDE FILMS ON GERMANIUM [J].
SLADKOVA, J .
CZECHOSLOVAK JOURNAL OF PHYSICS, 1968, 18 (06) :801-&
[10]   ELLIPSOMETRIC METHOD FOR DETERMINATION OF ALL OPTICAL PARAMETERS OF SYSTEM OF AN ISOTROPIC NONABSORBING FILM ON AN ISOTROPIC ABSORBING SUBSTRATE . OPTICAL CONSTANTS OF SILICON [J].
VEDAM, K ;
KNAUSENBERGER, W ;
LUKES, F .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1969, 59 (01) :64-+