ELLIPSOMETRIC METHOD FOR DETERMINATION OF ALL OPTICAL PARAMETERS OF SYSTEM OF AN ISOTROPIC NONABSORBING FILM ON AN ISOTROPIC ABSORBING SUBSTRATE . OPTICAL CONSTANTS OF SILICON

被引：58

作者：

VEDAM, K

KNAUSENBERGER, W

LUKES, F

机构：

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1969年 / 59卷 / 01期

关键词：

D O I：

10.1364/JOSA.59.000064

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：64 / +

页数：1

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