DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY

被引：298

作者：

ARCHER, RJ

机构：

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1962年 / 52卷 / 09期

关键词：

D O I：

10.1364/JOSA.52.000970

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：970 / &

共 26 条

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