CONTROL OF ZINC DIFFUSIVITY IN GAAS0.6P0.4 BY MULTIPLE IMPLANTATION

被引：6

作者：

STONEHAM, EB ^{[1
]}

GIBBONS, JF ^{[1
]}

机构：

[1] STANFORD UNIV,STANFORD ELECTR LABS,STANFORD,CA 94305

来源：

JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 12期

关键词：

D O I：

10.1063/1.323584

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5086 / 5091

页数：6

共 17 条

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[8]

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