STRUCTURE AND LOW-TEMPERATURE PROPERTIES OF NIOBIUM AND TANTALUM FILMS ARGON SPUTTERED ONTO STAINLESS-STEEL

被引：6

作者：

WITCOMB, MJ

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(80)90085-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：223 / 238

页数：16

共 49 条

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