STUDY OF INTERFACE DIFFUSION OF TI AND TIN PVD LAYERS BY BREMSSTRAHLUNG-INDUCED AES

被引：4

作者：

MEISEL, W ^{[1
]}

HANZEL, D ^{[1
]}

机构：

[1] EDVARD KARDELJ UNIV,J STEFAN INST,YU-61111 LJUBLJANA,YUGOSLAVIA

来源：

SURFACE AND INTERFACE ANALYSIS | 1992年 / 18卷 / 04期

关键词：

D O I：

10.1002/sia.740180407

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The influence of heat treatment in ultrahigh vacuum (UHV) on Ti and TiN layers coated by physical vapour deposition (PVD) has been studied by AES, XPS and bremsstrahlung-induced AES. It could be concluded that up to 500-degrees-C (1 h) the Ti layer does not change significantly. At the TiN/steel substrate interface, however, a counter-diffusion of nitrogen and adventitious oxygen takes place, resulting in partial nitridation of the steel substrate and oxidation of the coating.

引用

页码：284 / 288

页数：5

共 14 条

[1] ON THE INTERFACE BETWEEN IRON AND THIN-FILMS OF TITANIUM AND TITANIUM NITRIDE [J].

CARBUCICCHIO, M ;

PALOMBARINI, G .

HYPERFINE INTERACTIONS, 1990, 57 (1-4) :1783-1788

[2]

CHEN MH, 1979, ATOMIC DATA NUCL DAT, V24, P13

[3]

CHUNG MF, 1970, SURF SCI, V21, P253

[4]

FELDMAN LC, 1986, FUNDAMENTALS SURFACE, P323

[5]

FELDMANN LC, 1980, FUNDAMENTALS SURFACE, P329

[6]

GRAINGER S, 1989, ENG COATINGS DESIGN

[7]

HANZEL D, IN PRESS HYPERFINE I

[8]

HANZEL D, 1990, VUOTO, V20, P358

[9] ADHESION OF TITANIUM NITRIDE COATINGS ON HIGH-SPEED STEELS [J].

HELMERSSON, U ;

JOHANSSON, BO ;

SUNDGREN, JE ;

HENTZELL, HTG ;

BILLGREN, P .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (02) :308-315

[10]

Larkins F. P., 1977, Atomic Data and Nuclear Data Tables, V20, P311, DOI 10.1016/0092-640X(77)90024-9

← 1 2 →