IN-SITU HYDROGEN CHARGING OF THIN NB FILMS AND DEPTH PROFILING WITH THE H-1(N-15,ALPHA-GAMMA)C-12 NUCLEAR-REACTION

被引：7

作者：

BLASSER, S

STEIGER, J

WEIDINGER, A

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 85卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(94)95778-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The hydrogen concentration in Nb films in equilibrium with an external H2-gas was measured by the N-15-NRA method using a differential pumping system. We find that the hydrogen solubility in films is reduced compared to that of bulk samples. This can be explained by the clamping of epitaxial films to the substrate. These first direct measurements of solubility curves for films are in disagreement with earlier investigations by other authors, who found - based on indirect concentration determinations - an increased solubility in films. We think that the discrepancy is due to incorrect concentration determinations in these earlier studies.

引用

页码：24 / 27

页数：4

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