THE DYNAMICS OF BUBBLERS AS VAPOR DELIVERY SYSTEMS

被引:32
作者
LOVE, A [1 ]
MIDDLEMAN, S [1 ]
HOCHBERG, AK [1 ]
机构
[1] JC SCHUMACHER CO,CARLSBAD,CA 92009
关键词
D O I
10.1016/0022-0248(93)90441-X
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The dynamic response of a bubbler to changes in operating conditions is explored with a mathematical model that accounts for the thermal capacitance of the temperature control system. We show that three key dimensionless parameters control the performance of the system, and we indicate how experiments can be performed to determine these coefficients. Special attention is given to the factors that affect the heat transfer resistance between the external heater and the agitated liquid in the bubbler. Data are presented for heat transfer coefficients in a commercial bubbler operating under typical conditions, and the relative roles of convection generated by the action of the bubbles, buoyancy-driven convection, and internal heat conduction, are described.
引用
收藏
页码:119 / 133
页数:15
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