PARAMETRIC ANALYSIS OF CONTROL PARAMETERS IN MOCVD

被引:37
作者
BETSCH, RJ
机构
关键词
D O I
10.1016/0022-0248(86)90303-9
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
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页码:210 / 218
页数:9
相关论文
共 6 条
[1]  
MELAS A, 1983, COMMUNICATION
[2]  
MOORE WJ, 1972, PHYSICAL CHEM, P46
[3]   FACTORS INFLUENCING DOPING CONTROL AND ABRUPT METALLURGICAL TRANSITIONS DURING ATMOSPHERIC-PRESSURE MOVPE GROWTH OF ALGAAS AND GAAS [J].
ROBERTS, JS ;
MASON, NJ ;
ROBINSON, M .
JOURNAL OF CRYSTAL GROWTH, 1984, 68 (01) :422-430
[4]   COMPOSITIONAL TRANSIENTS IN MOCVD GROWN III-V-HETEROSTRUCTURES [J].
THRUSH, EJ ;
WHITEAWAY, JEA ;
WALEEVANS, G ;
WIGHT, DR ;
CULLIS, AG .
JOURNAL OF CRYSTAL GROWTH, 1984, 68 (01) :412-421
[5]   EVIDENCE FOR TRANSIENT COMPOSITION VARIATIONS AT GAAS/GAL-XALXAS HETEROSTRUCTURE INTERFACES PREPARED BY METAL-ORGANIC CHEMICAL VAPOR-DEPOSITION [J].
THRUSH, EJ ;
WALEEVANS, G ;
WHITEAWAY, JEA ;
LAMB, BL ;
WIGHT, DR ;
CHEW, NG ;
CULLIS, AG ;
GRIFFITHS, RJM .
JOURNAL OF ELECTRONIC MATERIALS, 1984, 13 (06) :969-988
[6]   CHARACTERIZATION OF LP-MOCVD GROWN (AL, GA)AS/GAAS HETEROSTRUCTURES BY PHOTOLUMINESCENCE - SINGLE HETEROJUNCTION AND INADVERTENT QUANTUM WELLS [J].
ZEMON, S ;
BLACK, J ;
NORRIS, P ;
LEE, J ;
LAMBERT, G .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (12) :L925-L927