SPUTTER GROWTH AND CHEMICAL-ANALYSIS BY X-RAY PHOTOELECTRON SPECTROSCOPY-ELECTRON SPECTROSCOPY OF AN INSE THIN-FILM

被引：21

作者：

MCEVOY, AJ

PARKES, A

SOLT, K

BICHSEL, R

机构：

[1] NEW UNIV ULSTER,DEPT PHYS,BELFAST,ANTRIM,NORTH IRELAND

[2] ECOLE POLYTECH FED LAUSANNE,PHYS APPL LAB,CH-1007 LAUSANNE,SWITZERLAND

来源：

关键词：

D O I：

10.1016/0040-6090(80)90211-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：L5 / L8

页数：4

共 8 条

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