GROWTH OF IN1-XGAXSB AND IN1-XALXSB FILMS BY MULTI-TARGET RF SPUTTERING

[1] GAAS, GAP, AND GAASXP1-X EPITAXIAL FILMS GROWN BY MOLECULAR BEAM DEPOSITION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (04): : 545 - &

[2] CHU L, 1973, IEEE T PARTS HYBRIDS, V9, P208

[3] PBXSN1-XTE LAYERS BY RF MULTICATHODE SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (08) : 3467 - 3471

[4] DZHANELIDZE RB, 1963, SOV PHYS-SOL STATE, V5, P501

[5] Khan I. M., 1970, HDB THIN FILM TECHNO, P10

[6] NEUBERGER M, 1972, 3-5 TERNARY SEMICOND

[7] OPTICAL PROPERTIES OF MULTISOURCE THERMALLY EVAPORATED 3-5 SEMICONDUCTOR COMPOUNDS [J]. APPLIED OPTICS, 1966, 5 (01): : 35 - &

[8] WEIDER HH, 1970, INTERMETALLIC SEMICO

[9] WICKERSHAM CE, 1975, THESIS U ILLINOIS

[10] SPUTTERING OF CDXHG1-XTE FILMS IN MERCURY VAPOR PLASMA [J]. THIN SOLID FILMS, 1972, 13 (02) : 373 - 378

[1] GAAS, GAP, AND GAASXP1-X EPITAXIAL FILMS GROWN BY MOLECULAR BEAM DEPOSITION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (04): : 545 - &

[2] CHU L, 1973, IEEE T PARTS HYBRIDS, V9, P208

[3] PBXSN1-XTE LAYERS BY RF MULTICATHODE SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (08) : 3467 - 3471

[4] DZHANELIDZE RB, 1963, SOV PHYS-SOL STATE, V5, P501

[5] Khan I. M., 1970, HDB THIN FILM TECHNO, P10

[6] NEUBERGER M, 1972, 3-5 TERNARY SEMICOND

[7] OPTICAL PROPERTIES OF MULTISOURCE THERMALLY EVAPORATED 3-5 SEMICONDUCTOR COMPOUNDS [J]. APPLIED OPTICS, 1966, 5 (01): : 35 - &

[8] WEIDER HH, 1970, INTERMETALLIC SEMICO

[9] WICKERSHAM CE, 1975, THESIS U ILLINOIS

[10] SPUTTERING OF CDXHG1-XTE FILMS IN MERCURY VAPOR PLASMA [J]. THIN SOLID FILMS, 1972, 13 (02) : 373 - 378