DISSOCIATION ENERGETICS OF SIF SYSTEMS OF RELEVANCE TO ETCHING REACTIONS

[21] HOROWITZ D, IN PRESS

[22] Hotop H., 1975, Journal of Physical and Chemical Reference Data, V4, P539, DOI 10.1063/1.555524

[23] SELF-CONSISTENT PROCEDURES FOR GENERALIZED VALENCE BOND WAVEFUNCTIONS - APPLICATIONS H-3, BH, H2O, C2H6, AND O2 [J]. JOURNAL OF CHEMICAL PHYSICS, 1972, 57 (02) : 738 - &

[24] GAUSSIAN-TYPE FUNCTIONS FOR POLYATOMIC SYSTEMS .I. [J]. JOURNAL OF CHEMICAL PHYSICS, 1965, 42 (04) : 1293 - &

[25] AN SCF-CL STUDY OF THE STRUCTURES, INVERSION BARRIERS, AND INVERSION FREQUENCIES OF SIH3, PH3+, AND SH3++ [J]. JOURNAL OF CHEMICAL PHYSICS, 1981, 74 (09) : 5186 - 5189

[26] SYNCHROTRON PHOTOEMISSION INVESTIGATION OF THE INITIAL-STAGES OF FLUORINE ATTACK ON SI SURFACES - RELATIVE ABUNDANCE OF FLUOROSILYL SPECIES [J]. PHYSICAL REVIEW B, 1984, 30 (02): : 764 - 770

[27] MOLECULAR ORBITAL INVESTIGATION OF CF AND SIF AND THEIR POSITIVE AND NEGATIVE IONS [J]. JOURNAL OF CHEMICAL PHYSICS, 1971, 55 (02) : 666 - &

[28] PROPERTIES OF MONOFLUORIDES OF NITROGEN, SILICON, PHOSPHORUS, AND SULFUR FROM A MOLECULAR-ORBITAL STUDY [J]. JOURNAL OF CHEMICAL PHYSICS, 1973, 59 (07) : 3842 - 3847

[29] THE SHAPE AND HAMILTONIAN CONSISTENT (SHC) EFFECTIVE POTENTIALS [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1981, 85 (12) : 1662 - 1666

[30] REDONDO A, UNPUB

[21] HOROWITZ D, IN PRESS

[22] Hotop H., 1975, Journal of Physical and Chemical Reference Data, V4, P539, DOI 10.1063/1.555524

[23] SELF-CONSISTENT PROCEDURES FOR GENERALIZED VALENCE BOND WAVEFUNCTIONS - APPLICATIONS H-3, BH, H2O, C2H6, AND O2 [J]. JOURNAL OF CHEMICAL PHYSICS, 1972, 57 (02) : 738 - &

[24] GAUSSIAN-TYPE FUNCTIONS FOR POLYATOMIC SYSTEMS .I. [J]. JOURNAL OF CHEMICAL PHYSICS, 1965, 42 (04) : 1293 - &

[25] AN SCF-CL STUDY OF THE STRUCTURES, INVERSION BARRIERS, AND INVERSION FREQUENCIES OF SIH3, PH3+, AND SH3++ [J]. JOURNAL OF CHEMICAL PHYSICS, 1981, 74 (09) : 5186 - 5189

[26] SYNCHROTRON PHOTOEMISSION INVESTIGATION OF THE INITIAL-STAGES OF FLUORINE ATTACK ON SI SURFACES - RELATIVE ABUNDANCE OF FLUOROSILYL SPECIES [J]. PHYSICAL REVIEW B, 1984, 30 (02): : 764 - 770

[27] MOLECULAR ORBITAL INVESTIGATION OF CF AND SIF AND THEIR POSITIVE AND NEGATIVE IONS [J]. JOURNAL OF CHEMICAL PHYSICS, 1971, 55 (02) : 666 - &

[28] PROPERTIES OF MONOFLUORIDES OF NITROGEN, SILICON, PHOSPHORUS, AND SULFUR FROM A MOLECULAR-ORBITAL STUDY [J]. JOURNAL OF CHEMICAL PHYSICS, 1973, 59 (07) : 3842 - 3847

[29] THE SHAPE AND HAMILTONIAN CONSISTENT (SHC) EFFECTIVE POTENTIALS [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1981, 85 (12) : 1662 - 1666

[30] REDONDO A, UNPUB