DIFFRACTION CONTRAST FROM SMALL SPHERICAL VOIDS IN SILICON

被引:3
作者
MAGEE, TJ
MORRISS, RH
MELVIN, CD
机构
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1972年 / 13卷 / 01期
关键词
D O I
10.1002/pssa.2210130111
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
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页码:107 / &
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