SPUTTERING AND DEPTH-DISTRIBUTION PHENOMENA IN KCL AL2O3 AND TIO2

被引：22

作者：

KELLY, R

机构：

来源：

CANADIAN JOURNAL OF PHYSICS | 1968年 / 46卷 / 06期

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D O I：

10.1139/p68-060

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

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页码：473 / &

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