INFRARED TRANSPARENT AND AMORPHOUS-CARBON GROWN UNDER ION IMPACT IN A BUTANE PLASMA

被引：65

作者：

HOLLAND, L

OJHA, SM

机构：

[1] Unit for Plasma Materials Processing, University of Sussex, Falmer, Sussex

来源：

THIN SOLID FILMS | 1978年 / 48卷 / 03期

关键词：

D O I：

10.1016/0040-6090(78)90005-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

收藏

页码：L21 / L23

页数：3

相关论文

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[3] HOLLAND L, 1976, Patent No. 33794
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