MOBILE CHARGE IN A NOVEL SPIN-ON OXIDE (SOX) - DETECTION OF HYDROGEN IN DIELECTRICS

被引：20

作者：

LIFSHITZ, N

SMOLINSKY, G

ANDREWS, JM

机构：

来源：

关键词：

D O I：

10.1149/1.2096936

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1440 / 1446

页数：7

共 9 条

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Sun R. C., 1980, 18th Annual Proceedings of Reliability Physics, P244, DOI 10.1109/IRPS.1980.362948

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