SYNTHESIS AND PREPARATION OF LANTHANUM ALUMINATE TARGET FOR RADIOFREQUENCY MAGNETRON SPUTTERING

被引：60

作者：

SUNG, GY

KANG, KY

PARK, SC

机构：

[1] Research Department, Electronics and Telecommunications Research Institute, Daeduk Science Town, Daejeon, Daeduk Science Town

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1991年 / 74卷 / 02期

关键词：

MAGNETRON; LANTHANUM; ALUMINATES; FILMS; SUPERCONDUCTORS;

D O I：

10.1111/j.1151-2916.1991.tb06904.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A polycrystalline LaAlO3 target for the radio-frequency (rf) magnetron sputterings of LaAlO3 thin films has been prepared. These films serve as a buffer layer for high-T(c) YBa2Cu3O7-x superconducting thin films on Si. Synthesis of lanthanum aluminate powder from a mixture of La2O3 and Al2O3 powders was performed by calcining from 1000-degrees to 1600-degrees-C in air. Characterization of the calcined powders by X-ray diffraction indicates that full development of LaAlO3 phase was evident in the sample calcined for 3 h at 1600-degrees-C in air. A polycrystalline LaAlO3 target was prepared by heat treatment at 1500-degrees-C for 2 h in air after pressureless sintering at 1750-degrees-C for 3 h in Ar. Thin films of the LaAlO3 on Si (100) were obtained by rf magnetron sputtering using the target and oxygen-annealing the as-deposited films.

引用

页码：437 / 439

页数：3

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