OXIDATION OF SEED LAYER FOR IMPROVED MAGNETIC AND RECORDING PERFORMANCE OF THIN-FILM RIGID DISKS

被引：4

作者：

MAHVAN, N ^{[1
]}

ZIERA, E ^{[1
]}

ELTOUKHY, A ^{[1
]}

机构：

[1] NASHUA COMP PROD,SANTA CLARA,CA 95050

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1993年 / 29卷 / 06期

关键词：

D O I：

10.1109/20.281271

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work the effect of oxidation of various seed layers for longitudinal media is described. Sputtered Ni3P exposed to controlled quantities of atmospheric gas and sputtering seed layers of Ti and Cr in an atmosphere of oxygen and argon are described. An appreciable increase of the coercivity and the coercivity squareness was observed. The observed improvements were attributed to the presence of an oxide layer that formed on the surface of the sputtered films as a result of oxidation. This oxidation was shown to affect the microstructure of the deposits, the more significant of which is narrowing of the grain size distribution of the subsequent layers. To a lesser extent, the seed layers seem to reduce the average grain size of the subsequent deposits.

引用

页码：3691 / 3693

页数：3

共 11 条

[1]

BRITTENHAM S, 1988, IEEE T MAG, V24, P2946

[2]

COUGHLIN TM, 1980, THESIS U MINNESOTA

[3] THE EFFECT OF CR UNDERLAYER THICKNESS ON MAGNETIC AND STRUCTURAL-PROPERTIES OF COPTCR THIN-FILMS [J].